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Retroreflex Ellipsometry for Nonplanar Surfaces
Chia-Wei Chen
2025
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Retroreflex ellipsometry addresses the geometric restrictions of conventional ellipsometry by using a retroreflective sheet, which returns the light beam from the sample on the same beam path. Simulation and experiments of retroreflex ellipsometry in two- and three-phase systems have been demonstrated based on the proposed concepts, which have shown the capabilities of ellipsometric measurements on nonplanar surfaces.
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Keywords
- Curved surfaces
- Dünnschicht- Messtechnik
- Ellipsometrie
- Ellipsometry
- gekrümmte Oberflächen
- Mueller matrix
- Müller-Matrix
- Retroreflex ellipsometry
- Retroreflex-Ellipsometrie
- thema EDItEUR::U Computing and Information Technology::UY Computer science::UYA Mathematical theory of computation::UYAM Maths for computer scientists
- Thin-film metrology
Links
DOI: 10.5445/KSP/1000177504Editions