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Mechanical properties of thin films studied by bulge testing
Benoit Merle
2013
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The bulge test is a method of choice for investigating the mechanical behavior of freestanding films as thin as a few hundreds of nanometers. The work presented in this book extends the scope of this technique to the study of the fracture, time-dependent and fatigue properties of different kinds of membranes, with applications to gold and silicon nitride samples. These results were achieved during a PhD thesis performed at the Institute for General Materials Properties of the Materials Science Department at the Friedrich-Alexander-University Erlangen-Nürnberg.
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Keywords
- bulge test
- Dünne Schicht
- Mechanische Eigenschaft
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