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Development of CMOS-MEMS/NEMS Devices
Jaume Verd and Jaume Segura
2019
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Micro and nano-electro-mechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within Integrated Circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for Semiconductors. The CMOS ICs and M/NEMS dies can be combined in the same package (SiP), or integrated within a single chip (SoC). In the SoC approach the M/NEMS devices are monolithically integrated together with CMOS circuitry allowing the development of compact and low-cost CMOS-M/NEMS devices for multiple applications (physical sensors, chemical sensors, biosensors, actuators, energy actuators, filters, mechanical relays, and others). On-chip CMOS electronics integration can overcome limitations related to the extremely low-level signals in sub-micrometer and nanometer scale electromechanical transducers enabling novel breakthrough applications. This Special Issue aims to gather high quality research contributions dealing with MEMS and NEMS devices monolithically integrated with CMOS, independently of the final application and fabrication approach adopted (MEMS-first, interleaved MEMS, MEMS-last or others).]
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Keywords
- application-specific integrated circuit (ASIC)
- atomic force microscope
- capacitive pressure sensor
- chopper instrumentation amplifier
- CMOS
- CMOS-MEMS
- CMOS–NEMS
- Encapsulation
- gas sensor
- Hall effect
- high-Q capacitive accelerometer
- infrared sensor
- interface circuit
- M3D
- magnetic field
- magnetotransistor
- mass sensors
- mechanical relays
- MEMS
- MEMS characterization
- MEMS modelling
- MEMS relays
- MEMS resonators
- MEMS switches
- MEMS-ASIC integration
- metal oxide (MOX) sensor
- micro sensor
- micro-electro-mechanical system (MEMS)
- micro-electro-mechanical systems (MEMS) sensors
- micro/nanoelectromechanical systems (MEMS/NEMS)
- microbolometer
- Microelectromechanical systems
- microhotplate
- microresonators
- n/a
- nano resonator
- nano-system array
- NEM memory switch
- NEMS
- oscillator
- pierce oscillator
- programmable sustaining amplifier
- real-time temperature compensation loop
- resonator
- Sigma-Delta
- silicon-on-insulator (SOI)
- single-crystal silicon (SC-Si)
- stent
- temperature sensor
- thermal detector
- uncooled IR-bolometer
Links
DOI: 10.3390/books978-3-03921-069-5Editions
