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X-ray optics made by X-ray lithography: Process optimization and quality control
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Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample’s microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio – their fabrication by X-ray lithography with optimal structure quality is the topic of this work.
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Keywords
- LIGA
- phase contrast
- Phasenkontrast
- Röntgengitter
- Röntgenoptik
- Talbot effect
- Talbot-Effect
- X-ray gratings
- X-ray optics
Links
DOI: 10.5445/KSP/1000070029Editions