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Entwicklung eines Röntgenmikroskops für Photonenenergien von 15 keV bis 30 keV
Felix Marschall
2014
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In many research areas X-rays are used for analysis. In X-ray full field microscopy a high resolution is achievable independent of the source properties by using imaging lenses. With an objective lens with 100 mm focal length a theoretical resolution of 60nm is achievable at 30 keV. In Experiments a resolution of 200 nm for a field of view of 80 µm
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Keywords
- full-field-microscopy
- microstructure technology
- Mikrostrukturtechnik
- Optics
- OptikX-ray microscopy
- refractive lens
- refraktive Linse
- Röntgenmikroskopie
- Vollfeldmikroskopie
Links
DOI: 10.5445/KSP/1000043064Editions