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Resonant Behaviour of Pulse Generators for the Efficient Drive of Optical Radiation Sources Based on Dielectric Barrier Discharges

Resonant Behaviour of Pulse Generators for the Efficient Drive of Optical Radiation Sources Based on Dielectric Barrier Discharges

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Dielectric barrier discharge (DBD) excimer lamps emit vacuum-UV optical radiation. This work presents novel methods for efficiently operating DBDs with short, high-voltage pulses. Transformer-less systems utilising SiC power semiconductor switches are presented. Pulse frequencies of up to 3.1 MHz and peak inverter efficiencies of 92 % were achieved. The work encloses both mathematical backgrounds of pulsed resonant circuits and practical implementation of low-inductive power stages.

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DOI: 10.5445/KSP/1000036098

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