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Prozessentwicklung eines industrietauglichen Verfahrens zur Fertigung von vereinzelten LIGA-Mikrobauteilen

Prozessentwicklung eines industrietauglichen Verfahrens zur Fertigung von vereinzelten LIGA-Mikrobauteilen

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This work deals with the development of an industry suited process aiming on the fabrication (based on the LIGA technique) of near net shape, single microparts. Those microparts should lead to new innovative ideas and thus to successful products on the market.

This book is included in DOAB.

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DOI: 10.5445/KSP/1000045013

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