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Entwicklung eines maskenlosen Fotolithographiesystems zum Einsatz im Rapid Prototyping in der Mikrofluidik und zur gezielten Oberflaechenfunktionalisierung
Waldbaur, Ansgar
2013
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In this work, a maskless lithography device based on a micro-mirror array was designed and built. Single projection frames are seamlessly projected next to each other. Microfluidic chips of several cm² size comprising channels of 50 µm have been built of various polymers via direct lithography and casting. Also, bio-chemical ligand patterns comprising 256 different ligand densities have been created in a few seconds on a 5 mm² substrate with pixel sizes of a few µm.
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Keywords
- Ligandenmuster
- lithographie
- Mikrofluidikchip
- Mikrospiegelarray
- rapid prototyping
- Technology, engineering, agriculture
- Technology: general issues
Links
DOI: 10.5445/KSP/1000036845Editions