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Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter changes, such as temperature, mass or stress, caused by changes in desired measurands, to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors, accelerometers, magnetic field sensors, microphones, radiation sensors, and particulate matter sensors. Despite a long history of development, fabrication of novel MEMS/NEMS devices still poses unique challenges due to their requirement for a suspended geometry; and many new fabrication techniques have been proposed to overcome these challenges. However, further development of these techniques is still necessary, as newer materials such as compound semiconductors, and 2-dimensional materials are finding their way in various MEMS/NEMS applications, with more complex structures and potentially smaller dimensions.
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Keywords
- 3D simulation
- acceleration switch
- accelerometer
- accelerometer design
- Accelerometer readout
- adaptive control
- AlGaN/GaN circular HFETs
- analytical model
- anisotropy
- back cavity
- backstepping approach
- bonding strength
- deflection position detector
- dual-mass MEMS gyroscope
- electrostatic force feedback
- femtosecond laser
- floating slug
- frequency mismatch
- frequency split
- frequency tuning
- GaAs MMIC
- GaN diaphragm
- gas sensor
- glass welding
- high temperature pressure sensors
- inertial switch
- infrared image
- level-set method
- low noise
- low zero-g offset
- magnetic
- MEMS
- MEMS (micro-electro-mechanical system)
- Methane
- micro fluidic
- micro-NIR spectrometer
- microactuator
- microdroplet
- microfluidic
- microgyroscope
- micropellistor
- microwave measurement
- n/a
- nanoparticle sensor
- oil detection
- optical sensor
- optomechanical sensor
- photonic crystal cavity
- photonic crystal nanobeam cavity
- power consumption
- pulse inertia force
- quadrature modulation signal
- rapid fabrication
- refractive index sensor
- resistance parameter
- resonant frequency
- scanning grating mirror
- Silicon
- single crystal silicon
- single-layer SiO2
- spring design
- squeeze-film damping
- suspended micro hotplate
- temperature sensor
- temperature uniformity
- tetramethylammonium hydroxide (TMAH)
- thermoelectric power sensor
- threshold accuracy
- tracking performance
- tunnel magnetoresistive effect
- vibrating ring gyroscope
- wet etching
- wideband
Links
DOI: 10.3390/books978-3-03921-635-2Editions
