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High-speed surface profilometry based on an adaptive microscope with axial chromatic encoding
Ding Luo
2021
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An adaptive microscope with axial chromatic encoding is designed and developed, namely the AdaScope. With the ability to confocally address any locations within the measurement volume, the AdaScope provides the hardware foundation for a cascade measurement strategy to be developed, dramatically accelerating the speed of 3D confocal microscopy.
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Keywords
- 3D measurement technology
- 3D Messtechnik
- chromatic
- chromatisch
- Computer science
- Computing & information technology
- confocal
- konfokal
- Mathematical theory of computation
- Maths for computer scientists
- Microscopy
- Mikroskopie
Links
DOI: 10.5445/KSP/1000125427Editions