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Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry
Christopher Taudt
2022
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This Open Access book discusses an extension to low-coherence interferometry by dispersion-encoding. The approach is theoretically designed and implemented for applications such as surface profilometry, polymeric cross-linking estimation and the determination of thin-film layer thicknesses. During a characterization, it was shown that an axial measurement range of 79.91 µm with an axial resolution of 0.1 nm is achievable. Simultaneously, profiles of up to 1.5 mm in length were obtained in a scan-free manner. This marked a significant improvement in relation to the state-of-the-art in terms of dynamic range. Also, the axial and lateral measurement range were decoupled partially while functional parameters such as surface roughness were estimated. The characterization of the degree of polymeric cross-linking was performed as a function of the refractive index. It was acquired in a spatially-resolved manner with a resolution of 3.36 x 10-5. This was achieved by the development of a novel mathematical analysis approach.
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Keywords
- Interferometry
- low-coherence interferometry
- Mathematics & science
- Mensuration & systems of measurement
- open access
- optical metrology
- Optical Physics
- Physics
- profilometry
- Science: general issues
- Scientific standards
- semiconductor manufacturing
- surface metrology
- thema EDItEUR::P Mathematics and Science::PD Science: general issues::PDD Scientific standards, measurement etc
- thema EDItEUR::P Mathematics and Science::PH Physics::PHJ Optical physics
Links
DOI: 10.1007/978-3-658-35926-3Editions