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Manufacturing Metrology
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Metrology is the science of measurement, which can be divided into three overlapping activities: (1) the definition of units of measurement, (2) the realization of units of measurement, and (3) the traceability of measurement units. Manufacturing metrology originally implicates the measurement of components and inputs for a manufacturing process to assure they are within specification requirements. It can also be extended to indicate the performance measurement of manufacturing equipment. This Special Issue covers papers revealing novel measurement methodologies and instrumentations for manufacturing metrology from the conventional industry to the frontier of the advanced hi-tech industry. Twenty-five papers are included in this Special Issue. These published papers can be categorized into four main groups, as follows: Length measurement: covering new designs, from micro/nanogap measurement with laser triangulation sensors and laser interferometers to very-long-distance, newly developed mode-locked femtosecond lasers. Surface profile and form measurements: covering technologies with new confocal sensors and imagine sensors: in situ and on-machine measurements. Angle measurements: these include a new 2D precision level design, a review of angle measurement with mode-locked femtosecond lasers, and multi-axis machine tool squareness measurement. Other laboratory systems: these include a water cooling temperature control system and a computer-aided inspection framework for CMM performance evaluation.
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Keywords
- 3D reconstruction
- a priori planning
- absolute angle measurement
- absolute distance measurement
- actual laser imaging waveform
- aeroengine blade
- angle measurement
- automated optical inspection
- blade tip timing
- blade twist
- centroid difference
- chromatic confocal probe
- circular contour
- circulating cooling water
- circumferential Fourier fit
- CMP
- compressed sensing
- confocal sensing
- confocal sensor
- coordinate measuring machine
- cutting edge radius
- defect detection
- depth detection
- diamond roller
- differential Fabry–Pérot interferometer
- differential measurement system
- diffraction grating
- dispensing robot
- dual-axis level
- dynamic measurement
- dynamic response speed
- dynamic thermal filtering
- edge detection
- elastic recovery
- end-plate surface distance measurement
- femtosecond laser
- film interferometry
- form measurement
- form truing
- GD&
- generative adversarial network (GAN)
- geometric analysis
- geometric deviations
- high aspect ratios
- History of engineering & technology
- homodyne interferometer
- identification method
- in-process
- in-situ measurements
- laser autocollimation
- laser interference
- laser triangulation displacement sensor (LTDS)
- length calibration
- light refraction
- light transmission
- linear displacement
- location system
- machine tool
- measurement and evaluation
- measurement mechanism
- measurement system analysis
- measurement uncertainty
- metrology
- metrology for machining
- miniature internal structures
- mode-locked femtosecond laser
- modular design
- Monte Carlo method
- multi-path laser synthesis technology
- multi-tasking machine tools
- n/a
- nanoindentation system
- Nonlinear Optics
- nonlinearity error
- off-axis differential method
- on-site measurement
- optical angle sensor
- Optical Coherence Tomography
- Optical Frequency comb
- over-constrained mechanism
- pad dressing
- pad lifetime
- pad uniformity
- point probing characteristics
- positional relation
- precision manufacturing
- precision measurement
- precision metrology
- Quality
- quick response
- repeatability accuracy
- reproducibility
- reversal method
- roughness
- roundness measurement
- scanless 3D imaging
- second harmonic generation
- single point diamond tool
- single-pixel detector
- spherical diamond wheel
- spherical scattering electrical field probe
- squareness of translational axes
- step gauge
- stitching linear-scan method
- surface charge distribution
- surface form tracing
- surface positioning
- surface shape contour
- surface texture measurement
- synchronous vibration
- system error correction
- T
- Technology, engineering, agriculture
- Technology: general issues
- temperature stability
- thermal management
- topography measurement
- tracking local minimum method
- wafer die
- white light interference
- you only look once version 3 (YOLOv3)
Links
DOI: 10.3390/books978-3-0365-2987-5Editions