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Micro/Nano Structures and Systems
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Micro/Nano Structures and Systems: Analysis, Design, Manufacturing, and Reliability is a comprehensive guide that explores the various aspects of micro- and nanostructures and systems. From analysis and design to manufacturing and reliability, this reprint provides a thorough understanding of the latest methods and techniques used in the field. With an emphasis on modern computational and analytical methods and their integration with experimental techniques, this reprint is an invaluable resource for researchers and engineers working in the field of micro- and nanosystems, including micromachines, additive manufacturing at the microscale, micro/nano-electromechanical systems, and more. Written by leading experts in the field, this reprint offers a complete understanding of the physical and mechanical behavior of micro- and nanostructures, making it an essential reference for professionals in this field.
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Keywords
- 3D nanostructures
- 5G
- additive manufacturing
- Analysis
- annular structure
- applications
- atomic layer deposition
- bistable mechanism
- burn-in
- cavitation
- coating
- compliant mechanism
- computational fluid dynamics
- concentric double-ring beams
- decoupling mechanism
- deep-narrow groove
- degradation
- delamination
- deployable structure
- Design
- DIG
- DRAs
- ECC
- EDM
- electrochemical milling
- experimental techniques
- fano resonance
- femtosecond laser machining
- finite element analysis
- flip-chip bonding
- Fresnel zone plate
- GH4169 alloy
- heterogeneous integration
- hybrid feeding
- InP
- Isolation
- linear guide
- magneto-solid-fluid interaction
- magnetorheological
- Maintenance
- material properties
- Materials
- Mechanics
- MEG
- MEMS
- metal-insulator-metal
- metamaterials (MMTs)
- micro automotive electronic pump
- micro- and nano-systems (MNS) fabrication and manufacturing
- micro-milling
- micropump
- microscale
- microstructures
- millimeter wave
- mmWave
- MRE
- Nanostructures
- Numerical Simulation
- optimization
- processes
- programmable behaviour
- Quality
- recast layer
- Reliability
- residual stress
- sacrificial templates
- SAR
- sensor
- SIC
- SiCp/Al
- SIW
- solidification
- SPPs
- SSL
- stable high gain
- stress gradients
- substrate
- Technology, engineering, agriculture
- Technology: general issues
- test structures
- thermodynamic effects
- thin-film material properties
- tool failure
- U-shaped ring resonator
- Warranty
- wear
- wedged end face
- wide bandwidth
Links
DOI: 10.3390/books978-3-0365-6544-6Editions