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Ion Beam Technology and Applications
Ozan Artun (editor)
2023
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The scientific and commercial purposes of ion beams are remarkable in many fields because ion beam technology is a primary tool that provides a wide range of applications in science, medicine, space, and engineering. This book presents theoretical and experimental knowledge about ion beam applications and technology. It includes six chapters that address such topics as the interaction of ion beams with matter, the evaluation of nuclear material damage, surface microstructure changes, oblique Ar+ sputtered SiC thin films, electron beam processing, and ribbon ion beams.
This book is included in DOAB.
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- 11 - pdf (CC BY) at mts.intechopen.com.
Keywords
- Condensed matter physics (liquid state & solid state physics)
- instability
- ion implantation
- Materials / States of matter
- Mathematics & science
- Physics
- radiation damage
- Raman spectroscopy
- silicon carbide
- thema EDItEUR::P Mathematics and Science::PH Physics::PHF Materials / States of matter::PHFC Condensed matter physics (liquid state and solid state physics)
Links
DOI: 10.5772/intechopen.111060Editions