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Refraktive Multifokusröntgenlinsen und Hartmann-Shack-Sensoren
Alexander Opolka
2024
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Compound refractive X-ray lenses (CRLs) have an absorption-limited numerical aperture. In this work, an array of CRLs with slightly inclined optical axes is used to circumvent this limitation in full-field microscopy at laboratory sources. Among other things, fabrication of CRLs via deep X-ray lithography and parallel fields of CRLs (Shack-Hartmann wavefront sensor, scanning imaging methods) are discussed.
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Keywords
- CRL
- full-field microscopy
- Hartmann-Shack Sensor
- LIGA
- Multi-CRL
- Multiröntgenlinse
- Shack-Hartmann sensor
- Vollfeldmikroskopie
Links
DOI: 10.5445/KSP/1000168831Editions