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Design and Fabrication of Micro/Nano Sensors and Actuators
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With the rapid development of materials science and manufacturing technology, numerous novel MEMS and NEMS devices, such as micro/nano-sensors and micro/nano-actuators, have been developed and applied in various fields. These devices are mostly made of silicon, metals, ceramics, glass, etc., whose mechanical and electrical properties have had a great influence on their working characteristics, including accuracy, sensitivity, and working range. In addition, the design and fabrication method can directly affect the reliability of these MEMS and NEMS devices, especially their lifetime, robustness, and stability under extreme conditions of shock, temperature, humidity, irradiation, chemical exposure, or other challenges. This Special Issue focuses on the structural design and optimization, system modeling and simulation, manufacturing, in situ characterization, and testing technologies of micro/nano-sensors and -actuators, providing research references for the further development and application of MEMS/NEMS devices.
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Keywords
- antenna
- Au–Si eutectic
- biomolecules
- bulk acoustic wave
- bulk acoustic wave (BAW)
- CMOS
- contact effect
- Difference
- dope
- electrochemical detection
- Fabrication
- fast readout circuit
- FEA
- first-principles
- flexible electronic process
- flip-chip
- force sensor
- four-cantilever beam
- frequency modulation
- gauge factor
- hydrogen storage property
- implantable medical devices (IMDs)
- inertial switch
- laser machining
- magnetic composite
- magnetic film
- magnetic sensor
- magnetoelectric coupling
- magnetoelectric transducer
- ME heterostructure
- MEMS
- MEMS processing technology
- micro metal coil
- micro-morphology
- microneedle
- n/a
- output charge sensitivity
- polylactic acid
- printing process
- radiation power
- resistive strain gauge
- resonance enhanced
- resonance modes
- resonant accelerometer
- sensitive direction
- sensitive grids
- Seth
- shock tunnel experiment
- single-crystal LiNbO3
- skin friction sensors
- stiction effect
- stiction-contact
- tactile sensor
- temperature compensation
- temperature dependence
- temporary handling
- threshold acceleration
- transmitter
- vacancy defect
- vibration sensor
- γ-GDY
Links
DOI: 10.3390/books978-3-7258-1543-2Editions