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keyword: Microelectromechanical systems – 4 free books.

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Smart Sensors and Devices in Artificial Intelligence

Dan Zhang and Xuechao Duan, editors

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Smart Sensors and Devices in Artificial Intelligence
Dan Zhang and Xuechao Duan, editors
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BioMEMS

Simona Badilescu and Muthukumaran Packirisamy

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BioMEMS
Simona Badilescu and Muthukumaran Packirisamy
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Neural Microelectrodes

Stuart F. Cogan and Joseph J. Pancrazio

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Neural Microelectrodes
Stuart F. Cogan and Joseph J. Pancrazio
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Development of CMOS-MEMS/NEMS Devices

Jaume Verd and Jaume Segura

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Development of CMOS-MEMS/NEMS Devices
Jaume Verd and Jaume Segura
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