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keyword: electrostatic actuator – 2 free books.

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Silicon Photonics Bloom

Ozdal Boyraz and Qiancheng Zhao, editors

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Silicon Photonics Bloom
Ozdal Boyraz and Qiancheng Zhao, editors
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MEMS Technology for Biomedical Imaging Applications

Qifa Zhou and Yi Zhang

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MEMS Technology for Biomedical Imaging Applications
Qifa Zhou and Yi Zhang
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