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keyword: micro-electro-mechanical systems (MEMS) – 3 free books.

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Gas Flows in Microsystems

Lucien Baldas and Stéphane Colin

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Gas Flows in Microsystems
Lucien Baldas and Stéphane Colin
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Optical MEMS

Huikai Xie and Frederic Zamkotsian Aix

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Optical MEMS
Huikai Xie and Frederic Zamkotsian Aix
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MEMS Accelerometers

Mahmoud Rasras et al.

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MEMS Accelerometers
Mahmoud Rasras et al.
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