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keyword: microelectromechanical system – 2 free books.
         These books are available in PDF format - good for desktops, printing.
        
        
           These books are available in PDF format - good for desktops, printing.
        
        
Design and Fabrication of Micro/Nano Sensors and Actuators, Volume II
Weidong Wang et al. (editors)
                
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    Advances in Micro and Nano Manufacturing: Process Modeling and Applications
Davide Masato and Giovanni Lucchetta, editors
                
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