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keyword: reactive magnetron sputtering – 3 free books.
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Functional Oxide Thin Films and Nanostructures: Growth, Properties, and Applications
Paolo Mele et al. (editors)
Micro-Nano Surface Functionalization of Materials and Thin Films for Optical Applications
Ramón Escobar-Galindo and Elena Guillén Rodríguez, editors
Technologies of Coatings and Surface Hardening for Tool Industry
Sergey N. Grigoriev (editor)